{"id":224,"date":"2022-02-24T10:35:10","date_gmt":"2022-02-24T10:35:10","guid":{"rendered":"https:\/\/www.fap-gmbh.de\/?page_id=224"},"modified":"2023-04-18T13:21:48","modified_gmt":"2023-04-18T13:21:48","slug":"mfc","status":"publish","type":"page","link":"https:\/\/www.fap-gmbh.de\/leistungen\/mfc\/","title":{"rendered":"Gas-, Mess- &#038; Regeltechnik"},"content":{"rendered":"\n<p><\/p>\n\n\n\n<p>F\u00fcr Beschichtungs-, \u00c4tz-, und diversen D\u00fcnnschichtanlagen in der Halbleiterindustrie, der Sensor-, Display- und Solarfertigung sowie der chemischen Industrie und der Forschung und Entwicklung bieten wir verschiedene Komponenten und Services der Gas- und Reinstgastechnik an.<\/p>\n\n\n<div class=\"wp-block-image my-10\">\n<figure class=\"aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"646\" height=\"278\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/leistungen-3.svg\" alt=\"\" class=\"wp-image-366\"\/><\/figure><\/div>\n\n\n<h3 class=\"wp-block-heading\"><strong>Produkte <\/strong><\/h3>\n\n\n\n<p><strong>der Fa. Proterial und Marken Hitachi\/AERA (andere Typen auf Anfrage)<\/strong><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-1 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-100 is-style-fill w-100 no-hand\"><a class=\"wp-block-button__link has-background wp-element-button\" style=\"border-radius:0px;background:linear-gradient(180deg,rgb(182,31,41) 0%,rgb(139,27,34) 100%)\">Elastomergedichtete MFC<\/a><\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-100 is-style-fill w-100 no-hand\"><a class=\"wp-block-button__link has-background wp-element-button\" style=\"border-radius:0px;background:linear-gradient(180deg,rgb(182,31,41) 0%,rgb(139,27,34) 100%)\">Metallgedichtete MFC<\/a><\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-100 is-style-fill w-100 no-hand\"><a class=\"wp-block-button__link has-background wp-element-button\" style=\"border-radius:0px;background:linear-gradient(180deg,rgb(182,31,41) 0%,rgb(139,27,34) 100%)\">Digitale MFC<\/a><\/div>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n<ul>\n<li>Verdampfersysteme f\u00fcr die Produktion<\/li>\n\n\n\n<li>Planung von Gassteuersystemen z.Bsp. f\u00fcr D\u00fcnnschichtabscheidungen im Vakuum<\/li>\n<\/ul>\n\n\n\n<p><strong>Spezifikationen\/Datenbl\u00e4tter MFC<\/strong><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-2 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h5 class=\"wp-block-heading has-text-align-center mt-3\"><strong>MFC Hitachi- AERA<\/strong><\/h5>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h5 class=\"wp-block-heading has-text-align-center mt-3\"><strong>MFC Hitachi- SAM<\/strong><\/h5>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-3 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_7700_English_0328.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_R7700_S.jpg\" alt=\"AERA_7700\" class=\"wp-image-284\" width=\"400\" height=\"266\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_R7700_S.jpg 800w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_R7700_S-300x200.jpg 300w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_R7700_S-768x511.jpg 768w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_R7700_S-18x12.jpg 18w\" sizes=\"(max-width: 400px) 100vw, 400px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_7700_English_0328.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi- AERA FC_R7700_S<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_7800__English_0328.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_DNR780C_S.jpg\" alt=\"FC_DNR780C_S\" class=\"wp-image-308\" width=\"400\" height=\"266\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_DNR780C_S.jpg 800w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_DNR780C_S-300x200.jpg 300w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_DNR780C_S-768x511.jpg 768w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_DNR780C_S-18x12.jpg 18w\" sizes=\"(max-width: 400px) 100vw, 400px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_FC-PAR78xx_DN78x_Series__English_0328.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi- AERA FC_DNR780C_S<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_FC-PAR78xx_DN78x_Series__English_0328.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_PAR780C_S.jpg\" alt=\"FC_PAR780C_S\" class=\"wp-image-309\" width=\"400\" height=\"266\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_PAR780C_S.jpg 800w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_PAR780C_S-300x200.jpg 300w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_PAR780C_S-768x511.jpg 768w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC_PAR780C_S-18x12.jpg 18w\" sizes=\"(max-width: 400px) 100vw, 400px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_FC-PAR78xx_DN78x_Series__English_0328.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi- AERA FC_PAR780C-S<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_H100_HG200-Series.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeroHG200_en.jpg\" alt=\"\" class=\"wp-image-310\" width=\"291\" height=\"400\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeroHG200_en.jpg 388w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeroHG200_en-218x300.jpg 218w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeroHG200_en-9x12.jpg 9w\" sizes=\"(max-width: 291px) 100vw, 291px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Aera_H100_HG200-Series.pdf\">DATENBLATT HERUNTERLADEN:<br>Aera HC100 HG200 Series English<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeraHC100_en.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/HC100-Analog.jpg\" alt=\"\" class=\"wp-image-311\" width=\"329\" height=\"400\"\/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/AeraHC100_en.pdf\">DATENBLATT HERUNTERLADEN:<br>Aera HC100 Analog<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC-PAR780781_HiTemp-MFC.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FCPAR780HT.jpg\" alt=\"\" class=\"wp-image-312\" width=\"415\" height=\"400\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FCPAR780HT.jpg 554w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FCPAR780HT-300x289.jpg 300w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FCPAR780HT-12x12.jpg 12w\" sizes=\"(max-width: 415px) 100vw, 415px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/FC-PAR780781_HiTemp-MFC.pdf\">DATENBLATT HERUNTERLADEN:<br>FCPAR780HT<\/a><\/figcaption><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-Fx-2480-Fx.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-FX-2480-FX.jpg\" alt=\"\" class=\"wp-image-305\" width=\"284\" height=\"359\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-FX-2480-FX.jpg 379w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-FX-2480-FX-238x300.jpg 238w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-FX-2480-FX-10x12.jpg 10w\" sizes=\"(max-width: 284px) 100vw, 284px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-Fx-2480-Fx.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi SAM 1480 Fx 2480 Fx<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G-2480-G.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G.jpg\" alt=\"\" class=\"wp-image-306\" width=\"289\" height=\"335\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G.jpg 391w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G-260x300.jpg 260w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G-10x12.jpg 10w\" sizes=\"(max-width: 289px) 100vw, 289px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480-G-2480-G.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi SAM 1480 G 2480 G<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F.pdf\"><img loading=\"lazy\" decoding=\"async\" width=\"271\" height=\"270\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F.jpg\" alt=\"\" class=\"wp-image-304\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F.jpg 271w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F-150x150.jpg 150w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F-12x12.jpg 12w\" sizes=\"(max-width: 271px) 100vw, 271px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-1480F.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi SAM 1480 F<\/a><\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100.pdf\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100.jpg\" alt=\"\" class=\"wp-image-307\" width=\"285\" height=\"325\" srcset=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100.jpg 380w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100-263x300.jpg 263w, https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100-11x12.jpg 11w\" sizes=\"(max-width: 285px) 100vw, 285px\" \/><\/a><figcaption class=\"wp-element-caption\"><a href=\"https:\/\/www.fap-gmbh.de\/wp-content\/uploads\/2022\/03\/Hitachi-SAM-PS100.pdf\">DATENBLATT HERUNTERLADEN:<br>Hitachi SAM PS100<\/a><\/figcaption><\/figure><\/div><\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading mt-10\"><strong>Verdampfersysteme<\/strong><\/h3>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-4 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<figure class=\"wp-block-table verdampfersysteme mt-3 mb-5\"><table class=\"has-fixed-layout\"><thead><tr><th>MODEL<\/th><th>AS103-A<\/th><th>AS103-B<\/th><th>AS92F<\/th><\/tr><\/thead><tbody><tr><td>Precursoren<\/td><td>TEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA Al(CH3)3<\/td><td>BTBAS &nbsp;(400sccm max)<\/td><td>TEOS (1.6SLM max)<\/td><\/tr><\/tbody><\/table><figcaption class=\"wp-element-caption\">Systeme sind auf Anfrage Verf\u00fcgbar.<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\t\t<div class='wp-block-csb-content-slider-block free  align' id='csbContentSlider-69990c21-f289-441a-8902-e6f041c6ae70' data-attributes='{&quot;cId&quot;:&quot;69990c21-f289-441a-8902-e6f041c6ae70&quot;,&quot;slides&quot;:[{&quot;background&quot;:{&quot;color&quot;:&quot;#00000080&quot;,&quot;type&quot;:&quot;image&quot;,&quot;gradient&quot;:&quot;linear-gradient(135deg, #4527a4, #8344c5)&quot;,&quot;image&quot;:{&quot;id&quot;:228,&quot;url&quot;:&quot;https:\\\/\\\/www.fap-gmbh.de\\\/wp-content\\\/uploads\\\/2022\\\/02\\\/image-3.png&quot;,&quot;alt&quot;:&quot;&quot;,&quot;title&quot;:&quot;image-3&quot;},&quot;position&quot;:&quot;center center&quot;,&quot;attachment&quot;:&quot;initial&quot;,&quot;repeat&quot;:&quot;no-repeat&quot;,&quot;size&quot;:&quot;contain&quot;,&quot;overlayColor&quot;:&quot;rgba(0, 0, 0, 0)&quot;,&quot;styles&quot;:&quot;background-image: url(https:\\\/\\\/www.fap-gmbh.de\\\/wp-content\\\/uploads\\\/2022\\\/02\\\/image-3.png); 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Produkte der Fa. Proterial und Marken Hitachi\/AERA (andere Typen auf Anfrage) Spezifikationen\/Datenbl\u00e4tter MFC MFC Hitachi- AERA MFC Hitachi- SAM Verdampfersysteme MODEL [&hellip;]<\/p>\n","protected":false},"author":5,"featured_media":454,"parent":85,"menu_order":2,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_eb_attr":"","inline_featured_image":false,"footnotes":""},"acf":[],"_links":{"self":[{"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/pages\/224"}],"collection":[{"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/comments?post=224"}],"version-history":[{"count":55,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/pages\/224\/revisions"}],"predecessor-version":[{"id":532,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/pages\/224\/revisions\/532"}],"up":[{"embeddable":true,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/pages\/85"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/media\/454"}],"wp:attachment":[{"href":"https:\/\/www.fap-gmbh.de\/wp-json\/wp\/v2\/media?parent=224"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}