For coating, etching and various thin-film systems in the semiconductor industry, sensor, display and solar production as well as the chemical industry and research and development, we offer various components and services for gas and ultra-pure gas technology.
Products
der Marken AERA und SAM des Herstellers Kuwana Metals
- Evaporator systems for the production
- Planning of gas control systems, for example for thin film deposition in vacuum
Specifications/data sheets MFC
MFC AERA
MFC SAM
Evaporator systems
| MODEL | AS103-A | AS103-B | AS92F |
|---|---|---|---|
| Precursors | TEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA, Al(CH3)3 | BTBAS (400sccm max) | TEOS (1.6 SLM max) SiCl4 (1.0 SLM max) |
weitere Informationen zu unseren Gasfluß-Produkten
https://www.fineflowservice.com
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