Gas Measurement & Control Technology

For coating, etching and various thin-film systems in the semiconductor industry, sensor, display and solar production as well as the chemical industry and research and development, we offer various components and services for gas and ultra-pure gas technology.

Products

of company Hitachi/AERA (other types on request)

Specifications/data sheets MFC

MFC Hitachi - AERA
MFC Hitachi - SAM

Evaporator systems

MODELAS103-AAS103-BAS92F
PrecursorsTEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA, Al(CH3)3BTBAS (400sccm max)TEOS (1.6 SLM max)
Systems are available on request.

Evaporator system AS103

Evaporator system AS92F

For more information about Hitachi gas flow products

https://www.hitachi-metals.co.jp/e/products/infr/ie/p05_08.html

https://www.hitachimetals.com/materials-products/mfc-flow-products.php

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