For coating, etching and various thin-film systems in the semiconductor industry, sensor, display and solar production as well as the chemical industry and research and development, we offer various components and services for gas and ultra-pure gas technology.
the company Proterial and brands Hitachi/Aera (other types on request)
Specifications/data sheets MFC
|Precursors||TEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA, Al(CH3)3||BTBAS (400sccm max)||TEOS (1.6 SLM max)|