Gas Measurement & Control Technology

For coating, etching and various thin-film systems in the semiconductor industry, sensor, display and solar production as well as the chemical industry and research and development, we offer various components and services for gas and ultra-pure gas technology.

Products

the company Proterial and brands Hitachi/Aera (other types on request)

Specifications/data sheets MFC

MFC Hitachi - AERA
MFC Hitachi - SAM

Evaporator systems

MODELAS103-AAS103-BAS92F
PrecursorsTEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA, Al(CH3)3BTBAS (400sccm max)TEOS (1.6 SLM max)
SiCl4 (1.0 SLM
max)
Additional systems available on request.

For more information about Hitachi gas flow products

https://www.fineflowservice.com

https://www.kuwana-metals.com/e

https://www.okaya.co.jp/en/

en_GBEN